(Same as Bioengineering M250B and Mechanical and Aerospace Engineering M280B.) Lecture, three hours; discussion, one hour; outside study, eight hours. Enforced requisite: course M153. Advanced discussion of micromachining processes used to construct MEMS. Coverage of many lithographic, deposition, and etching processes, as well as their combination in process integration. Materials issues such as chemical resistance, corrosion, mechanical properties, and residual/intrinsic stress. Letter grading.