Growth and Processing of Electronic Materials
Lecture, four hours; discussion, one hour; outside study, seven hours. Requisites: courses 120, 130, 131. Thermodynamics and kinetics that affect semiconductor growth and device processing. Particular emphasis on fundamentals of growth (bulk and epitaxial), heteroepitaxy, implantation, oxidation. Letter grading.
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Enrollment Progress
Dec 4, 3 PM PST
LEC 1: 30/30 seats taken (Full)
Section List
LEC 1
FullTR 2pm-3:50pm
Boelter Hall 9436
Course
Previous Grades
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