Lecture, four hours; discussion, one hour; outside study, seven hours. Enforced requisite: course 104. Description of basic semiconductor materials for device processing; preparation and characterization of silicon, III-V compounds, and films. Discussion of principles of CVD, MOCVD, LPE, and MBE; metals and dielectrics. Letter grading.

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Course

Instructor
Mark S. Goorsky
Previously taught
24W 23Su 23W 22W 21W 16W 15W 14W 13W 12W 11W 10W 09W 04W