(Same as Electrical and Computer Engineering M252 and Mechanical and Aerospace Engineering M282.) Lecture, four hours; discussion, one hour; outside study, seven hours. Introduction to MEMS design. Design methods, design rules, sensing and actuation mechanisms, microsensors, and microactuators. Designing MEMS to be produced with both foundry and nonfoundry processes. Computer-aided design for MEMS. Design project required. Letter grading.