Lecture, four hours; discussion, one hour; outside study, seven hours. Requisite: course 2. Principles of integrated circuits fabrication processes. Technological limitations of integrated circuits design. Topics include bulk crystal and epitaxial growth, thermal oxidation, diffusion, ion-implantation, chemical vapor deposition, dry etching, lithography, and metallization. Introduction of advanced process simulation tools. Letter grading.

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Course

Instructor
Subramanian S. Iyer
Previously taught
23S 19S 18S
Formerly offered as
EL ENGR 222

Previous Grades

Grade distributions not available.