Deposition Technologies and Their Applications
Lecture, four hours; discussion, one hour; outside study, seven hours. Examination of physics behind majority of modern thin film deposition technologies based on vapor phase transport. Basic vacuum technology and gas kinetics. Deposition methods used in high-technology applications. Theory and experimental details of physical vapor deposition (PVD), chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition processes. Letter grading.
Review Summary
- Clarity
-
N/A
- Organization
-
N/A
- Time
-
N/A
- Overall
-
N/A
Enrollment Progress
Mar 11, 3 PM PST
LEC 1: 25/30 seats taken (Open)
Section List
LEC 1
Open (7 seats)TR 8am-9:50am
Boelter Hall 4760