Lecture, four hours; outside study, eight hours. Enforced requisite: course 115C. Challenges of digital circuit design and layout in deeply scaled technologies, with focus on design-manufacturing interactions. Summary of large-scale digital design flow; basic manufacturing flow; lithographic patterning, resolution enhancement, and mask preparation; yield and variation modeling; circuit reliability and aging issues; design rules and their origins; layout design for manufacturing; test structures and process control; circuit and architecture methods for variability mitigation. Letter grading.